[A-11-3] Low Temperature Oxidation of Silicon by Microwave Discharged Oxygen Plasma

Shin-ichiro Kimura、Eiichi Murakami、Kiyoshi Miyake、Terunori Warabisako、Hideo Sunami (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1984.A-11-3