Characteristics of Selective Deposition of Metal Organic Films Using Focused Ion Beams

Kenji Gamo; Nobuyuki Takakura; Daisuke Takehara; Susumu Namba

doi:https://doi.org/10.7567/SSDM.1984.A-2-5

1984 International Conference on Solid State Devices and Materials

Aug 30, 1984 - Sep 1, 1984
International Conference Center Kobe, Kobe, Japan

[A-2-5] Characteristics of Selective Deposition of Metal Organic Films Using Focused Ion Beams

Kenji Gamo, Nobuyuki Takakura, Daisuke Takehara, Susumu Namba (1.Department of Electrical Engineering Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1984.A-2-5

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