[A-2-5] Characteristics of Selective Deposition of Metal Organic Films Using Focused Ion Beams

Kenji Gamo、Nobuyuki Takakura、Daisuke Takehara、Susumu Namba (1.Department of Electrical Engineering Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1984.A-2-5