[A-3-1] Overgrowth and Characterization of Epitaxial Silicon on Patterned NiSi2 Grown by Molecular Beam Epitaxy

Akitoshi Ishizaka, Patricia A. Cullen, Yasuhiro Shiraki (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1984.A-3-1