[A-3-3] Self-Aligned Titanium Silicidation by Lamp Annealing

K. Tsukamoto, T. Okamoto, M. Shimizu, T. Matsukawa, H. Harada (1.LSI R&D Lab., Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1984.A-3-3