[A-3-3] Self-Aligned Titanium Silicidation by Lamp Annealing

K. Tsukamoto、T. Okamoto、M. Shimizu、T. Matsukawa、H. Harada (1.LSI R&D Lab., Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1984.A-3-3