Photo-CVD of a-Si Films Using Unified Reactor with Lamp

Yasuo TARUI; Katsumi AOTA; Koichi KAMISAKO; Shinji SUZUKI; Tatsumi HIRAMOTO

doi:https://doi.org/10.7567/SSDM.1984.A-9-2

1984 International Conference on Solid State Devices and Materials

1984年8月30日〜 1984年9月1日
International Conference Center Kobe, Kobe, Japan

[A-9-2] Photo-CVD of a-Si Films Using Unified Reactor with Lamp

Yasuo TARUI、Katsumi AOTA、Koichi KAMISAKO、Shinji SUZUKI、Tatsumi HIRAMOTO (1.Department of Electronic Engineering, Tokyo University of Agriculture & Technology、2.Ushio Inc.)

https://doi.org/10.7567/SSDM.1984.A-9-2

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