[A-9-2] Photo-CVD of a-Si Films Using Unified Reactor with Lamp

Yasuo TARUI, Katsumi AOTA, Koichi KAMISAKO, Shinji SUZUKI, Tatsumi HIRAMOTO (1.Department of Electronic Engineering, Tokyo University of Agriculture & Technology, 2.Ushio Inc.)

https://doi.org/10.7567/SSDM.1984.A-9-2