[B-11-3] Deposition of a-Si by LPCVD at Low Temperatures from Monosilane-Atomic Hydrogen Mixtures

P. Landouar、N. Proust、J. Magarino (1.Laboratoire Central de Recherches, THOMSON-CSF)

https://doi.org/10.7567/SSDM.1984.B-11-3