[B-12-3] Semitransparent Metal-Si Electrodes for a-Si:H Photodiodes and Their Application to a Contact-Type Linear Sensor Array

A. Sasano、H. Yamamoto、K. Seki、Y. Tanaka、T. Baji、T. Tanaka、H. Matsumaru、T. Tsukada (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1984.B-12-3