[B-3-1] Short-Term and Long-Term Reliability of Nitrided Oxide MISFET's

Toru KAGA、Takahisa KUSAKA、Takaaki HAGIWARA、Yuji YATSUDA、Kiichiro MUKAI (1.CENTRAL RESEARCH LABORATORY, HITACHI Ltd.)

https://doi.org/10.7567/SSDM.1984.B-3-1