[B-9-1] Three Dimensional Thermal Analysis for Laser Annealing and Its Application to the Design of the SOI Structures

Takayuki Morishita、Toshiaki Miyajima、Jun Kudo、Masayoshi Koba、Katunobu Awane (1.Semiconductor Research Laboratories, SHARP Corporation)

https://doi.org/10.7567/SSDM.1984.B-9-1