[B-9-1] Three Dimensional Thermal Analysis for Laser Annealing and Its Application to the Design of the SOI Structures

Takayuki Morishita, Toshiaki Miyajima, Jun Kudo, Masayoshi Koba, Katunobu Awane (1.Semiconductor Research Laboratories, SHARP Corporation)

https://doi.org/10.7567/SSDM.1984.B-9-1