[C-11-5] Effects of Implantation and Impurity Density on Disorder of AlAs/GaAs Superlattice M. KAWABE、N. MATSUURA、N. SHIMIZU、F. HASEGAWA、Y. NANNICHI (1.Institute of Materials Science, University of Tsukuba) https://doi.org/10.7567/SSDM.1984.C-11-5