[C-11-5] Effects of Implantation and Impurity Density on Disorder of AlAs/GaAs Superlattice

M. KAWABE, N. MATSUURA, N. SHIMIZU, F. HASEGAWA, Y. NANNICHI (1.Institute of Materials Science, University of Tsukuba)

https://doi.org/10.7567/SSDM.1984.C-11-5