The Effect of Substrate Purity on Short-Channel Effects of GaAs MESFET&apos;s

Hiroshi Nakamura; Masanori Tsunotani; Yoshiaki Sano; Toshio Nonaka; Toshimasa Ishida; Katsuzo Kaminishi

doi:https://doi.org/10.7567/SSDM.1984.C-7-2

1984 International Conference on Solid State Devices and Materials

1984年8月30日〜 1984年9月1日
International Conference Center Kobe, Kobe, Japan

[C-7-2] The Effect of Substrate Purity on Short-Channel Effects of GaAs MESFET's

Hiroshi Nakamura、Masanori Tsunotani、Yoshiaki Sano、Toshio Nonaka、Toshimasa Ishida、Katsuzo Kaminishi (1.Research Laboratory, Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1984.C-7-2

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