[D-11-3] Influences and Kinetics of the GaAs-LPMOCVD Growth Rates Due to Se, Sn, S and Zn Dopants

C. Y. Chang, M. K. Lee, Y. K. Su, Y. C. Chou, L. P. Chen (1.Semiconductor and System Laboratories, National Cheng Kung University)

https://doi.org/10.7567/SSDM.1984.D-11-3