[D-11-3] Influences and Kinetics of the GaAs-LPMOCVD Growth Rates Due to Se, Sn, S and Zn Dopants

C. Y. Chang、M. K. Lee、Y. K. Su、Y. C. Chou、L. P. Chen (1.Semiconductor and System Laboratories, National Cheng Kung University)

https://doi.org/10.7567/SSDM.1984.D-11-3