[D-11-4] MOCVD Growth and Characterization of AlGaInP Materials by a New Pre-Cracking Technique for PH3

Yuzaburoh BAN、Mototsugu OGURA、Motoji MORISAKI、Nobuyasu HASE (1.Central Research Laboratory, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1984.D-11-4