The Japan Society of Applied Physics

[D-11-5] Growth Conditions and Doping Control in GaInAsP/InP OMVPE

Sigeo Sugou, Atsushi Kameyama, Yasuyuki Miyamoto, Chiaki Watanabe, Kazuhito Furuya, Yasuharu Suematsu (1.Department of Physical Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1984.D-11-5