[D-3-5] Compositional Inhomogeneity of InGaAsP/GaAs LPE Layer by Precision X-Ray Diffractometry

Kazumasa Hiramatsu, Kazuyoshi Tomita, Nobuhiko Sawaki, Isamu Akasaki (1.Department of Electronics, School of Engineering Nagoya University)

https://doi.org/10.7567/SSDM.1984.D-3-5