[LD-1-4] Production of Single Crystalline Cubic-SiC with 2-inch Diameter by CVD and Characteristics of MOS Diodes

Shigehiro Nishino、Kentaro Shibahara、Shinichi Dohmae、Hiroyuki Matsunami (1.Department of Electrical Engineering, Kyoto University)

https://doi.org/10.7567/SSDM.1984.LD-1-4