[LD-6-7] Computer Controlled Phase-Locked Epitaxy(PLE) of (GaAs)n(AlAs)n using RHEED Oscillation

T. Sakamoto、H. Funabashi、K. Ohta、T. Nakagawa、N. J. Kawai、T. Kojima (1.Electrotechnical Laboratory、2.Japan Aviation Electronics Industry Co. Ltd.)

https://doi.org/10.7567/SSDM.1984.LD-6-7