Computer Controlled Direct Pattern Writing by Argon Laser Induced Chemical Vapor Deposition

Akira Ishizu; Hidejiro Miki; Yoichiro Onishi Tadashi Nishimura; Yoichi Akasaka

doi:https://doi.org/10.7567/SSDM.1984.LD-7-2

1984 International Conference on Solid State Devices and Materials

1984年8月30日〜 1984年9月1日
International Conference Center Kobe, Kobe, Japan

[LD-7-2] Computer Controlled Direct Pattern Writing by Argon Laser Induced Chemical Vapor Deposition

Akira Ishizu、Hidejiro Miki、Yoichiro Onishi Tadashi Nishimura、Yoichi Akasaka (1.Materials & Electronic Devices Lab., Mitsubishi Electric、2.LSI Research & Development Lab., Mitsubishi Electric)

https://doi.org/10.7567/SSDM.1984.LD-7-2

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