The Japan Society of Applied Physics

[LD-7-2] Computer Controlled Direct Pattern Writing by Argon Laser Induced Chemical Vapor Deposition

Akira Ishizu、Hidejiro Miki、Yoichiro Onishi Tadashi Nishimura、Yoichi Akasaka (1.Materials & Electronic Devices Lab., Mitsubishi Electric、2.LSI Research & Development Lab., Mitsubishi Electric)

https://doi.org/10.7567/SSDM.1984.LD-7-2