[A-2-7] Homogeneous Recrystallization of Si Islands through Wafer by Dual Laser Beam lrradiation

K. YAMAZAKI, N. YOSHII, S. OGAWA, S. AKIYAMA, Y. TERUI (1.Advanced Devices Laboratory, Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1985.A-2-7