[A-3-7] SiO2 Photo-CVD Using Reactive Oxygen by Double Light Excitation
Masanori OKUYAMA、Kohji INOUE、Masanori MICHIMORI、Yoshihiro HAMAKAWA
(1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)
https://doi.org/10.7567/SSDM.1985.A-3-7