[A-3-8] Laser Initiated Chemical Vapor Deposition of Tungsten Films on Silicon Dioxide

A. Shintani, S. Tsuzuku, E. Nishitani, M. Nakatani (1.Central Res. Lab. Hitachi, Ltd., 2.Production Engineering Res. Lab. Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1985.A-3-8