[A-3-8] Laser Initiated Chemical Vapor Deposition of Tungsten Films on Silicon Dioxide

A. Shintani、S. Tsuzuku、E. Nishitani、M. Nakatani (1.Central Res. Lab. Hitachi, Ltd.、2.Production Engineering Res. Lab. Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1985.A-3-8