[A-4-3] Impurity and Ambient Effects on Self-Aligned Titanium Silicidation by Rapid Lamp Annealing

T. Okamoto, K. Tsukamoto, M. Shimizu, Y. Mashiko, T. Matsukawa (1.LSI R&D Lab. Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1985.A-4-3