[A-4-3] Impurity and Ambient Effects on Self-Aligned Titanium Silicidation by Rapid Lamp Annealing

T. Okamoto、K. Tsukamoto、M. Shimizu、Y. Mashiko、T. Matsukawa (1.LSI R&D Lab. Mitsubishi Electric Corp.)

https://doi.org/10.7567/SSDM.1985.A-4-3