[A-4-4] Refractory-Metal-Silicide Contact Formation by Rapid Thermal Annealing

Nobuyoshi NATSUAKI, Kiyonori OHYU, Tadashi SUZUKI, Nobuyoshi KOBAYASHI, Naotaka HASHIMOTO, Yasuo WADA (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1985.A-4-4