[A-5-1] Electron Beam Image Projection System with High Accelerating Voltage

Irchiro Mori, Toshiaki Shinozaki, Kazuyoshi Sugihara, Chikara Itoh, Mitsuo Tabata (1.VLSI Research Center, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1985.A-5-1