[A-5-6] Characterization of a Newly Developed Contrast Enhancement Material for G-Line Exposure

H. Niki、M. Nakase、A. Kumagae、T. Satoh、K. Ikari (1.Toshiba Research & Development Center、2.VLSI Research Center Toshiba Corporation)

https://doi.org/10.7567/SSDM.1985.A-5-6