[B-2-2] Low-Pressure OMVPE of GaAs Using a Triethylgallium Source

K. Kimura、S. Takagishi、S. Horiguchi、K. Kamon、M. Mihara、M. Ishii (1.Optoelectronics Joint Research Laboratory)

https://doi.org/10.7567/SSDM.1985.B-2-2