[B-5-10] New Self-Aligned Gate Material; LaB6 for GaAs-IC

Tatsuo Yokotsuka, Yoko Uchida, Keisuke L. I. Kobayashi, Tadashi Narusawa, Hisao Nakashima (1.Optoelectronics Joint Research Laboratory)

https://doi.org/10.7567/SSDM.1985.B-5-10