[B-5-8] Characterization of Microscopic Uniformity of Semi-Insulating GaAs Substrate by Using High Density FET Array

Hiroshi Nakamura、Hajime Matsuura、Takashi Egawa、Yoshiaki Sano、Toshimasa Ishida、Katsuzo Kaminishi (1.Research Laboratory, Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1985.B-5-8