[B-5-8] Characterization of Microscopic Uniformity of Semi-Insulating GaAs Substrate by Using High Density FET Array

Hiroshi Nakamura, Hajime Matsuura, Takashi Egawa, Yoshiaki Sano, Toshimasa Ishida, Katsuzo Kaminishi (1.Research Laboratory, Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1985.B-5-8