[C-1-9LN] Preparation of high photosensitive a-SiGe:H alloys from glow-discharge plasma

Akihisa Matsuda, Masato Koyama, Yuichiro Imanishi, Motoo Toyama, Nozomu Ikuchi, Kazunobu Tanaka (1.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1985.C-1-9LN