[C-1-9LN] Preparation of high photosensitive a-SiGe:H alloys from glow-discharge plasma

Akihisa Matsuda、Masato Koyama、Yuichiro Imanishi、Motoo Toyama、Nozomu Ikuchi、Kazunobu Tanaka (1.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1985.C-1-9LN