[C-3-6LN] Lateral Solid Phase Epitaxy of Amorphous Si Films onto Non-planar SiO2 Patterns

Hiroshi Ishiwara、Akihiro Tamba、Seijiro Furukawa (1.Graduate School of Science and Engineering, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1985.C-3-6LN