[C-4-3LN] Nondestructive Observation of Microdefects in GaAs Wafers by Photothermal-Radiation Microscope

Hiromichi Nakamura、Kazuo Tsubouchi、Nobuo Mikoshiba (1.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1985.C-4-3LN