The Japan Society of Applied Physics

[A-2-2] Holographic Nanometer Alignment for a Wafer Stepper

Kazuhiro Yamashita, Noboru Nomura, Toyoki Takemoto (1.Basic Research Laboratory, Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1986.A-2-2