[A-5-3] Thin Film Formation by Radical Jet Generated by UV Laser-Induced Multi-Photon Dissociation

Y. Ichikawa、N. Itoh、H. Sakai、Y. Uchida (1.Fuji Electric Co. Research and Development, Ltd.)

https://doi.org/10.7567/SSDM.1986.A-5-3