[A-6-1] A New Side Wall Protection Technique in Microwave Plasma Etching Using a Chopping Method

K. Tsujimoto、S. Tachi、K. Ninomiya、K. Suzuki、S. Okudaira、S. Nishimatsu (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1986.A-6-1