[A-6-1] A New Side Wall Protection Technique in Microwave Plasma Etching Using a Chopping Method

K. Tsujimoto, S. Tachi, K. Ninomiya, K. Suzuki, S. Okudaira, S. Nishimatsu (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1986.A-6-1