[A-7-1] Variation of Electrical and Optical Properties of Glow Discharge Si-N-H Films with Their Composition

Nicole PROUST, Francois BOULITROP, Bernard HEPP, Nicolas SZYDLO, Eric CRITON, Jose MAGARINO (1.THOMSON-CSF Central Research Laboratory, BP N°10)

https://doi.org/10.7567/SSDM.1986.A-7-1