[A-7-2] Growth and Properties of Dielectric Thin Films by Microwave-Excited Plasma

S. Zaima、Y. Yasuda、S. Takashima、T. Nakamura、A. Yoshida (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology、2.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University)

https://doi.org/10.7567/SSDM.1986.A-7-2