[A-7-2] Growth and Properties of Dielectric Thin Films by Microwave-Excited Plasma

S. Zaima, Y. Yasuda, S. Takashima, T. Nakamura, A. Yoshida (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 2.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University)

https://doi.org/10.7567/SSDM.1986.A-7-2