[A-8-1] Ellipsometric Characterization of Very Thin Gate Oxides and Correlation with Electrical Properties

Y. Z. Yu、K. K. Hung、Y. C. Cheng (1.Department of Physics, Zhongshan University、2.Department of Electrical Engineering, University of Hong Kong)

https://doi.org/10.7567/SSDM.1986.A-8-1